Patents

Machine learning innovations for semiconductor metrology, defect inspection, and image enhancement

Showing 10 patents

2024

Diversifying SEM Measurement Schemes

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WO2024165248A1 · 2024

Diversifying SEM measurement schemes for improved accuracy

metrology machine-learning

High-Resolution Information from Low-Resolution Images

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WO2024013161A1 · 2024

Obtaining high resolution information from low resolution images

enhancement machine-learning

2025

Method and System for Predicting Metrology Data Using a Neural Network

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WO2025247596A1 · 2025

Neural network-based prediction of metrology data

metrology machine-learning

Performance Cost-Based Training Dataset Generation for Mask Prediction

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WO2025223790A1 · 2025

Method and system for performance cost-based training dataset generation for mask prediction

metrology machine-learning

Pellicle Membrane for EUV Utilization Apparatus

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WO2025201829A1 · 2025

Pellicle membrane for an EUV utilization apparatus and method of manufacturing thereof

metrology

Defect Identification and Segmentation Without Labeled Data

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EP4607460A2 · 2025

Defect identification/segmentation without labeled data and image quality enhancement

inspection enhancement self-supervised

Measurement Charge Removal Using Diffusion Models

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EP4607453A2 · 2025

Measurement charge removal and per-layer stack geometry inference using diffusion models

metrology enhancement machine-learning

Primitive-Based Mask Prediction

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WO2025124841A1 · 2025

Method and system for primitive-based mask prediction

metrology machine-learning

Contrastive Deep Learning for Defect Inspection

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WO2025108661A1 · 2025

Contrastive deep learning for defect inspection

inspection self-supervised machine-learning

Data Processing Method for Charged Particle Assessment

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WO2025026668A1 · 2025

Data processing method, charged particle assessment method and system

metrology machine-learning